Methods related to radio-frequency filters on silicon-on-insulator substrate

ABSTRACT

Methods related to radio-frequency (RF) filters on silicon-on-insulator (SOI) substrate. In some embodiments, a method of manufacturing a radio-frequency device can include providing a semiconductor die including a radio-frequency circuit, a first side and a second side, and a plurality of vias, each via configured to provide an electrical connection between the first side and the second side of the semiconductor die. The method can further include mounting a filter device on the first side of the semiconductor die, the filter device in communication with the radio-frequency circuit, the radio-frequency circuit implemented in a layer on the first side of the semiconductor die and at least some of the vias coupled with the radio-frequency circuit to support an electrical connection between the radio-frequency circuit and mounting features on the second side of the semiconductor die.

CROSS-REFERENCE TO RELATED APPLICATION(S)

This application is a continuation of U.S. patent application Ser. No.16/819,142, filed Mar. 15, 2020, entitled “DEVICES AND METHODS RELATEDTO RADIO-FREQUENCY FILTERS ON SILICON-ON-INSULATOR SUBSTRATE,” which isa continuation of U.S. patent application Ser. No. 15/192,812, filedJun. 24, 2016, entitled “DEVICES AND METHODS RELATED TO RADIO-FREQUENCYFILTERS ON SILICON-ON-INSULATOR SUBSTRATE,” now U.S. Pat. No.10,594,355, issued Mar. 17, 2020, which claims priority to U.S.Provisional Application No. 62/187,174, filed Jun. 30, 2015, entitled“DEVICES AND METHODS RELATED TO RADIO-FREQUENCY FILTERS ONSILICON-ON-INSULATOR SUBSTRATE,” the disclosure of each of which ishereby expressly incorporated by reference herein in its entirety.

BACKGROUND Field

The present disclosure relates to, among others, radio-frequency (RF)filters on silicon-on-insulator (SOI) substrate.

Description of the Related Art

In some radio-frequency (RF) applications, a signal received ortransmitted through an antenna can be routed to different amplificationpaths through band selection switches and respective filters. In suchapplications, it is desirable to minimize or reduce degradation of thesignal.

SUMMARY

According to a number of implementations, the present disclosure relatesto a radio-frequency (RF) device that includes a silicon die including afirst side and a second side, and a plurality of vias, with each viaconfigured to provide an electrical connection between the first sideand the second side of the silicon die. The RF device further includesat least one RF flip chip mounted on the first side of the silicon die.

In some embodiments, the second side of the silicon die can beconfigured to be mountable in a flip-chip manner. The second side of thesilicon die can include a plurality of bump solders, with at least someof the bump solders being electrically connected to respective ones ofthe plurality of vias.

In some embodiments, the silicon die can include a silicon-on-insulator(SOI) substrate. The SOI substrate can include an insulator layerinterposed between an active silicon layer and a silicon substratelayer.

In some embodiments, the silicon die can include an RF circuit incommunication with the RF flip chip. The RF circuit can include a switchcircuit. The RF circuit can further include a logic circuit for theswitch circuit. The RF circuit can further include a passive component.The passive component can include one or more of a capacitance, aninductance, and a resistance.

In some embodiments, the RF circuit can further include one or more of alow-noise amplifier (LNA) circuit and a power amplifier (PA) circuit.

In some embodiments, the RF circuit can include a band-selection circuitconfigured to route a received RF signal to a selected low-noiseamplifier (LNA). In some embodiments, the received RF signal can berouted through a filter prior to the selected LNA, with the filter beingimplemented in the RF flip chip. In some embodiments, the received RFsignal can be routed through a filter after the selected LNA, with thefilter being implemented in the RF flip chip.

In some embodiments, the RF circuit can be part of an LNA module. Insome embodiments, the RF circuit can be part of a diversity receive (RX)module.

In some embodiments, the RF circuit can be implemented at or near thefirst side of the silicon die. At least some of the vias can be coupledwith the RF circuit to facilitate an electrical connection between theRF circuit and mounting features on the second side of the silicon die.

In some embodiments, the RF circuit can be implemented at or near thesecond side of the silicon die. At least some of the vias can be coupledwith the RF circuit to allow communication between the RF circuit andthe RF flip chip mounted on the second side of the silicon die.

In some embodiments, the RF flip chip can include an RF filter. The RFfilter can be a surface acoustic wave (SAW) filter or a bulk acousticwave (BAW) filter. The silicon die can include an RF circuit incommunication with the SAW filter. The RF circuit can include alow-noise amplifier (LNA).

According to some teachings, the present disclosure relates to a methodfor fabricating a radio-frequency (RF) device. The method includesforming or providing a silicon wafer that includes a first side and asecond side. The silicon wafer further includes a plurality of vias,with each via being configured to provide an electrical connectionbetween the first side and the second side of the silicon wafer. Themethod further includes mounting a plurality of RF flip chips on thefirst side of the silicon wafer. The method further includes singulatingthe silicon wafer into a plurality of die units, with each die unitincluding at least one RF flip chip mounted on the first side.

In some implementations, the present disclosure relates to aradio-frequency (RF) module that includes a packaging substrateconfigured to receive a plurality of components, and a wafer level chipscale package (WLCSP) mounted on the packaging substrate. The WLCSP hasa silicon die that includes a first side and a second side. The silicondie further includes a plurality of vias, with each via being configuredto provide an electrical connection between the first side and thesecond side of the silicon die. The WLCSP further includes at least oneRF flip chip mounted on the first side of the silicon die.

In some embodiments, the silicon die can include an RF circuit incommunication with the RF flip chip. The WLCSP can have a lateraldimension that is less than 20% of a lateral area of a package with asilicon die with a similar RF circuit and a similar number of RF flipchips mounted on a packaging substrate instead of the silicon die. TheWLCSP can have a height that is less than the height of the package. Theheight of the WLCSP can be less than ⅔ of the height of the package,such that the overall volume of the WLCSP is less than approximately 20%of the overall volume of the package.

In some embodiments, the RF flip chip can include a filter circuit. TheRF circuit can include a low-noise amplifier (LNA). The RF module canbe, for example, a GPS module, an LNA module, or a diversity receive(RX) module.

In accordance with a number of implementations, the present disclosurerelates to a wireless device that includes an antenna configured toreceive an RF signal, and a receiver in communication with the antennaand configured to process the received RF signal. The wireless devicefurther includes an RF module configured to route the received RF fromthe antenna to the receiver. The RF module includes a wafer level chipscale package (WLCSP) having a silicon die that includes a first sideand a second side. The silicon die further includes a plurality of vias,with each via being configured to provide an electrical connectionbetween the first side and the second side of the silicon die. The WLCSPfurther includes at least one RF flip chip mounted on the first side ofthe silicon die.

In some teachings, the present disclosure relates to a device thatincludes a semiconductor die having a first side and a second side. Thesemiconductor die further includes a plurality of vias, with each viabeing configured to provide an electrical connection between the firstside and the second side of the semiconductor die. The semiconductor diefurther includes an active integrated circuit (IC). The device furtherincludes a flip chip device mounted on the first side of thesemiconductor die. The flip chip device includes a signal conditioningcircuit.

In some embodiments, the signal conditioning circuit can be a passivecircuit. In some embodiments, the signal conditioning circuit can be afilter circuit.

For purposes of summarizing the disclosure, certain aspects, advantagesand novel features of the inventions have been described herein. It isto be understood that not necessarily all such advantages may beachieved in accordance with any particular embodiment of the invention.Thus, the invention may be embodied or carried out in a manner thatachieves or optimizes one advantage or group of advantages as taughtherein without necessarily achieving other advantages as may be taughtor suggested herein.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows a flip chip device mounted on a semiconductor substrate.

FIG. 2 shows an example of a flip chip device as a filter device such asa radio-frequency (RF) filter, and a semiconductor substrate as asilicon-on-insulator (SOI) substrate.

FIG. 3 shows a more detailed example of the filter-SOI assembly of FIG.2.

FIG. 4 shows another more detailed example of the filter-SOI assembly ofFIG. 2.

FIGS. 5A and 5B show example processes that can be implemented tofabricate devices having one or more features as described herein.

FIGS. 6A and 6B show example processes that can be implemented as morespecific examples of the processes of FIGS. 5A and 5B, to fabricatefilter-on-SOI substrate devices.

FIG. 7 shows a band-selection switching circuit for a low-noiseamplifier (LNA) as an example of RF applications for which filter-on-SOIconfigurations as described herein can be implemented.

FIG. 8 shows that in some embodiments, a band-selection switchingcircuit having one or more filters on one side of an SOI die and theother side configured to be mountable can provide a number ofadvantageous features.

FIG. 9 shows an example of a diversity receive (RX) architecture inwhich one or more features as described herein can be implemented.

FIG. 10 shows a more detailed example of a diversity RX module that canbe implemented for the architecture of FIG. 9.

FIG. 11 shows that in some embodiments, the diversity RX module of FIG.10 can be implemented in a configuration having some or all filtersmounted on one side of a single SOI die and the other side configured tobe mountable.

FIG. 12 shows that in some embodiments, the diversity RX module of FIG.10 can be implemented in a configuration having filters mounted on someor all of a plurality of SOI die.

FIG. 13 shows an example of a clock recovery circuit configured togenerate a timing signal from an input of data signal.

FIG. 14 shows that some or all of the clock recovery circuit of FIG. 11can be implemented in a configuration having one or more filters mountedon one side of a semiconductor die and the other side configured to bemountable.

FIG. 15 schematically depicts an example wireless device having one ormore advantageous features described herein.

DETAILED DESCRIPTION OF SOME EMBODIMENTS

The headings provided herein, if any, are for convenience only and donot necessarily affect the scope or meaning of the claimed invention.

Described herein are various examples of devices and methods related toone or more flip chip devices mounted on a semiconductor substrate. Sucha configuration (100) is depicted in FIG. 1, where a flip chip device102 is shown to be mounted on a semiconductor substrate 104 with, forexample, bump solders 106. FIG. 2 shows a more specific exampleconfiguration 100 where the flip chip device (102 in FIG. 1) can be afilter device 102 such as a radio-frequency (RF) filter; and where thesemiconductor substrate (104 in FIG. 1) can be a silicon-on-insulator(SOI) substrate 104.

Various examples are described herein in the context of filters and SOIsubstrates. However, it will be understood that one or more features ofthe present disclosure can also be implemented with other types of flipchip devices and/or semiconductor substrates. In some embodiments,semiconductor substrates such as complementary metal-oxide-semiconductor(CMOS) and silicon-germanium (SiGe) BiCMOS can also be utilized. In someembodiments, semiconductor substrates can include gallium arsenide(GaAs) and other compound semiconductor substrates, including, forexample, GaAs heterojunction bipolar transistor (HBT), BiHEMT (e.g.,integration of HBT and pseudomorphic high-electron-mobility transistor(pHEMT)), GaAs BiHEMT, GaAs pHEMT, and gallium nitride (GaN). In someembodiments, other substrates can be utilized, including, for example,quartz, polymer materials, silicon carbide, sapphire, diamond,germanium, etc. In some embodiments, active electronic and/orsemiconductor devices can be implemented on or within a substrate or alayer that is formed over such a substrate. In some embodiments (e.g.,quartz) passive devices (e.g., capacitors, resistors, inductors, etc.)can be implemented on or within a substrate.

In the context of filters, the flip chip devices can include, forexample, surface acoustic wave (SAW) filters, bulk acoustic wave (BAW)filters, and thin-film bulk acoustic resonators (FBAR or TFBAR). For thepurpose of description herein, it will be understood that filters caninclude related devices such as duplexers. As described herein, filterssuch as the foregoing examples are utilized to, for example, conditionRF signals at desired locations relative to related circuits.Accordingly, it will be understood that one or more features of presentdisclosure can also be implemented with one or more signal conditioningflip chip devices that may or may not include filters, being mounted ona semiconductor substrate such as an SOI substrate.

FIG. 2 shows that in some embodiments, one or more filters 102 can beflip-chip mounted (e.g., with bump solders 106) on an SOI substrate 104.Such filters can be mounted on a front side or a back side of the SOIsubstrate. Examples of both configurations are described herein ingreater detail. For the purpose of description, the front side can bethe side where one or more integrated circuits and/or passive componentsare formed or provided; and the back side can be the opposite side.

In some embodiments, the side of the SOI substrate 104 without thefilter(s) 102 can be configured to be flip-chip mountable onto, forexample, a circuit board such as a phone board. In the example shown,bump solders 110 can be formed on the non-filter side to allow suchflip-chip mounting. Conductive vias 108 can be formed through orpartially-through the SOI substrate 104 so as to provide electricalconnections between at least some of the bump solders 110 and one ormore circuits that are part of the SOI substrate 104. Examples of suchcircuits are described herein in greater detail. Although variousflip-chip mounting examples are described herein in the context of bumpsolders, it will be understood that other mounting techniques can alsobe implemented. For example, copper pillars or gold bumps withanisotropic conductive epoxies, etc. can be utilized.

A device configured in the foregoing manner can allow an SOI substrateto include circuits such as RF switches, low-noise amplifiers (LNAs),power amplifiers (PAs), and/or passive components (e.g., capacitors andinductors); and also have filters flip-chip mounted thereon. Because ofthe filters being stacked on the SOI substrate, a number of advantageousfeatures can be realized. For example, the overall footprint size of theSOI circuits and the corresponding filters can be reduced greatly, sincesome or all of the filters can be positioned on the SOI substrate ratherthan beside the SOI substrate on a common plane. Further, the flip-chipmounting of the filters on the SOI substrate can significantly reducethe amount of electrical connection features (e.g., metal traces),thereby minimizing or reducing signal loss between the SOI circuits andthe filters. Aside from the foregoing, other benefits can include, forexample, reduced parasitics, and improved performance.

In the example of FIG. 2, the bump solders 110 and the correspondingconductive vias 108 can allow the SOI circuits and the filters to becollectively configured and packaged as a flip chip surface mountablecomponent. In some embodiments, the SOI substrate can be configured tobe mountable in other manners, including surface mounting with wirebondconnections.

FIGS. 3 and 4 show more detailed examples of the filter-SOI assembly 100of FIG. 2. In an example configuration 150 of FIG. 3, a filter 102 isshown to be mounted on the front side of an SOI substrate 104, with thefront side having an active silicon layer 160 on which an integratedcircuit (IC) 158 is formed. Interposed between the active silicon layer160 and a silicon substrate layer 164 is an insulator layer 162 togenerally form the SOI structure.

In FIG. 3, an example bump solder 106 is shown to provide mechanicalmounting functionality as well as an electrical connection betweencontact pads 152 (on the filter 102) and 154 (on the SOI substrate 104).The contact pad 152 can be electrically connected to a filtering circuitof the filter 102. Similarly, the contact pad 154 can be electricallyconnected to the IC 158 so as to electrically connect the filteringcircuit with the IC 158.

The IC 158 can also be electrically connected to a conductor 156 whichis in turn electrically connected to a through-substrate conductive via108. On the back side of the SOI substrate 104, the via 108 is shown tobe in electrically connected to a contact pad 166. A bump solder 168 canallow the SOI substrate 104 to be mounted to another layer 172 (througha contact pad 170) such as a circuit board or a packaging substrate.Accordingly, the via 108 can provide an electrical connection betweenthe IC 158 and a location on the layer 172, such as a circuit.

In some embodiments, it may be desirable to configure the via 108 (e.g.,a conductive through-wafer via (TWV)) to be electrically isolated from aconductive portion of the substrate. For example, in the context of theforegoing SOI substrate, the conductive via 108 can pass through thesilicon substrate layer 164 which is typically a conductive substrate.Thus, to electrically isolate one via from another, an insulator (e.g.,SiO₂ liner) can be provided between the via 108 and the siliconsubstrate layer 164. The insulator layer 162 is an insulator, and theactive silicon layer 160 usually includes processing structures that canisolate various structures; accordingly, electrical isolation of the via108 can be provided or facilitated by such features. In someembodiments, electrical isolation of the via 108 may not be needed.

In the example of FIG. 3, the flip-chip mounting of the filter 102 onthe front side of the SOI substrate 104 allows the filter 102 to beclose to the IC 158 to yield beneficial features as described herein. Insome situations, it may be desirable to position the filter (102) awayfrom the IC (158). For example, there may be isolation and/or mechanicaldesign considerations where having the filter (102) on the back side(e.g., the side opposite from the active silicon layer 160) ispreferable.

FIG. 4 shows an example configuration 150 in which a filter 102 ismounted on the back side of an SOI substrate 104, with the front sidehaving an active silicon layer 160 on which an IC 158 is formed.Interposed between the active silicon layer 160 and a silicon substratelayer 164 is an insulator layer 162 to generally form the SOI structure.The front side of the SOI substrate 104 is shown to be mounted toanother layer 172 (through a contact pad 186, a bump solder 168, and acontact pad 170) such as a circuit board or a packaging substrate. Thecontact pad 186 on the front side can be electrically connected to theIC 158, such that the foregoing mounting through the bump solder 168provides an electrical connection between the IC 158 and a location onthe layer 172.

In FIG. 4, an example bump solder 106 is shown to provide mechanicalmounting functionality as well as an electrical connection between acontact pad 152 of the filter 102 and a contact pad 180 on the back sideof the SOI substrate 104. The contact pad 152 can be electricallyconnected to a filtering circuit of the filter 102. Similarly, thecontact pad 180 can be electrically connected to the IC 158 through aconductive via 182 and a conductor 184 on the front side of the SOIsubstrate 104, so as to electrically connect the filtering circuit withthe IC 158. In some embodiments, various conductor features such as thevia 182 can be configured to yield a desired property such as aninterconnect inductance to provide, for example, conditioning of RFsignals between various locations of the device.

FIGS. 5A and 5B show examples of processes 200 a and 200 b respectively,that can be implemented to fabricate a device having a configuration 100of FIG. 1. Referring to FIGS. 5A and 5B, in both blocks 202 a and 202 b,a semiconductor substrate can be formed or provided. In both blocks 204a and 204 b, an integrated circuit (IC) and/or a passive component canbe formed on the semiconductor substrate. In both blocks 206 a and 206b, a plurality of first contact features can be formed on one side ofthe semiconductor substrate, with at least some of the first contactfeatures being electrically connected to the IC. Referring to FIG. 5A,in block 208 a, an RF device can be flip-chip mounted on the firstcontact features. Also in FIG. 5A, and in block 210 a, a plurality ofsecond contact features can be formed on the other side of thesemiconductor substrate, with at least some of the second contactfeatures being electrically connected to the IC. Referring to FIG. 5B,in block 208 b, a plurality of second contact features can be formed onthe other side of the semiconductor substrate, with at least some of thesecond contact features being electrically connected to the IC, and inblock 210 b, an RF device can be flip-chip mounted on the first contactfeatures.

Each process of FIGS. 5A and 5B further shows that a device fabricatedin the foregoing manner can be mounted on a circuit board such as aphone board. For example, in both blocks 212 a and 212 b, thesemiconductor substrate can be flip-chip mounted on the circuit board.

FIGS. 6A and 6B show examples processes 220 a and 220 b respectively,that can be implemented as more specific examples of the processes 200 aand 200 b of FIGS. 5A and 5B respectively, to fabricate a plurality offilter-on-SOI substrate devices. Referring to FIGS. 6A and 6B, in bothblocks 222 a and 222 b, an SOI wafer can be formed or provided. In bothblocks 224 a and 224 b, a plurality of wafer level chip scale units canbe formed on the SOI wafer, with each unit having one or more ICs and/orone or more passive components. In both blocks 226 a and 226 b, aplurality of first contact pads can be formed on one side of the SOIwafer, with at least some of the first contact pads being electricallyconnected to their respective ICs. Referring to FIG. 6A, in block 228 a,one or more filter devices can be flip-chip mounted on the first contactpads, and in block 230 a, a plurality of second contact pads can beformed on the other side of the SOI wafer, with at least some of thesecond contact pads being electrically connected to their respectiveICs. Also in FIG. 6A, in block 232 a, solder bumps can be formed on thesecond contact pads. Referring to FIG. 6B, in block 228 b, a pluralityof second contact pads can be formed on the other side of the SOI wafer,with at least some of the second contact pads being electricallyconnected to their respective ICs, and in block 230 b, solder bumps canbe formed on the second contact pads. Also in FIG. 5B, and in block 232b, one or more filter devices can be flip-chip mounted on the firstcontact pads. In the example of FIG. 6B, block 232 b can also beperformed before block 230 b. In each of FIGS. 6A and 6B, in blocks 234a and 234 b, the SOI wafer can be singulated into a plurality of waferlevel scale package (WLCSP) units.

FIGS. 7-12 show examples of RF applications for which filter-on-SOIconfigurations as described herein can be implemented. FIG. 7 shows anexample of a band-selection switching circuit 300 for a low-noiseamplifier (LNA). In the example, a pole of a first switch 320 is shownto be connected to an antenna port (ANT) for receiving an RF signal.Four example throws of the first switch 320 are shown to allow routingof the RF signal to four different paths, with each of the first tothird paths including its respective filter (102 a, 102 b or 102 c) andLNA (322 a, 322 b or 322 c), and the fourth path being a bypass path.Although not shown in FIG. 7, filters can also be provided after theLNAs (322 a, 322 b, 322 c). Four throws of a second switch 324 are shownto allow connection of the four different paths to an output port(RFOUT). Bias signals for the LNAs (322 a, 322 b, 322 c), as well aslogic signals for the first and second switches (320, 324) are shown tobe provided by a bias and logic circuit 326. Control signals, supplyvoltage and grounding are shown to be provided for the bias and logiccircuit 326 through various ports (e.g., DGND, VDD, C1, C2). Similarly,an RF ground is shown to be facilitated by an RFGND port.

In some embodiments, a silicon die (e.g., SOI die) having circuits forthe first and second switches 320, 324, the LNAs 322 a, 322 b, 322 c,and the bias and logic 326 (collective functionality depicted as dashedbox 304) can be mounted on a packaging substrate in either wirebond orflip-chip configuration. The filters 102 a, 102 b, 102 c (collectivefunctionality depicted as dotted box 302) (and, in some embodiments,filters after the LNAs (322 a, 322 b, 322 c)) can also be mounted on thesame packaging substrate. In such a configuration, the overall area of adevice (e.g., a module) having the band-selection switching circuit 300will include areas occupied by the circuits, the filters, and relatedconnection features.

As described herein, and as shown in FIG. 8, a band-selection switchingcircuit 300 having one or more filters 102 on one side of an SOI die 104and the other side configured to be mountable (e.g., flip-chip mountwith bump solders 306) can provide a number of advantageous features,including significant reduction in the overall area of the circuit 300.For example, if the foregoing example configuration described inreference to FIG. 7 (where the filters are laid out next to the silicondie on the packaging substrate) occupies or requires a volume ofapproximately 3 mm (length)×4 mm (width) by 0.9 mm (height), it isestimated that the same circuit implemented in the configuration of FIG.8 can occupy or require a reduced volume of approximately 1.3 mm(length)×1.5 mm (width) with a height of less than 0.6 mm. In terms oflateral area, the reduced area is about 16% of the 3 mm×4 mm example. Insome embodiments, such a reduced lateral area can be, for example, 20%or less, 16% or less, or 13% or less than a lateral area associated witha configuration where the filters are laid out next to the silicon dieon the packaging substrate. In terms of volume, the reduced volume isless than 11% of the 3 mm×4 mm×0.9 mm example. In some embodiments, sucha reduced volume can be, for example, 20% or less, 15% or less, 13% orless, or 11% or less than a volume associated with a configuration wherethe filters are laid out next to the silicon die on the packagingsubstrate.

In the example band-selection switching circuit 300 of FIG. 7, circuitsfor the first and second switches 320, 324, the LNAs 322 a, 322 b, 322c, and the bias and logic 326 implemented on the silicon die arecollectively depicted by the box 304. In the example of FIG. 8, some orall of such circuits having the same functionality (depicted as a box304) can be implemented on and/or in the SOI die 104. The functionalityof the filters 102 a, 102 b, 102 c in the example of FIG. 7 is depictedby the box 302. In the example of FIG. 8, the same functionality(depicted as a box 302) can be implemented in the one or more filters102 mounted on the SOI die 104.

In the context of the filters 102 a, 102 b, 102 c being mounted on thesame packaging substrate as the silicon die in FIG. 7, such a packagingsubstrate can be represented by a substrate 310. In the context of thefilters 102 a, 102 b, 102 c being mounted on the SOI die 104 in FIG. 8,the SOI die 104 itself can function as a packaging substrate suitablefor mounting to a circuit board; and accordingly, the SOI die 104 can berepresented by the substrate 310 of FIG. 7. Further, in the example ofFIG. 8, the bump solders 306 can be electrically connected to thevarious ports (e.g., ANT, RFOUT, RFGND, DGND, VDD, C1, C2) associatedwith the band-selection switching circuit 300, as described in referenceto FIG. 7.

FIGS. 9-12 show another example where one or more features of thepresent disclosure can be implemented. FIG. 9 shows an example receive(RX) architecture 350 associated with a diversity antenna 352. Such areceive antenna is typically placed relatively far away from the mainantenna; and both of the main antenna and the diversity antenna can beactive at once to, for example, increase the data throughput. Due to therelatively remote location of the diversity antenna, its signal isusually attenuated by a lossy signal path (e.g., 372 in FIG. 9).

Accordingly, and as shown in FIG. 9, a diversity RX circuit 360 (e.g.,in a module) can be implemented to add gain close to the diversityantenna 352. Thus, an RF signal received by the diversity antenna 352can be provided to the diversity RX module 360 as an input (through path354). The diversity RX module 360 can process the RF signal and providethe processed RF signal with a gain before being routed to a transceiverthrough the lossy signal path 372. The transceiver may or may notinclude an LNA to further amplify the RF signal received from thediversity RX module 360.

In the example of FIG. 9, the LNA associated with the transceiver, ifany, may or may not be configured to include one or more features asdescribed herein.

In the example of FIG. 9, the diversity RX module 360 can include inputand output switches 362, 368 configured to provide band selectionfunctionality for one or more LNAs 366. Filters 364 for the variousfrequency bands associated with the diversity RX module 360 can beprovided between the input switch 362 and the LNA(s) 366.

In the example diversity RX module 360 of FIG. 9, circuits associatedwith the input and output switches 362, 368 and the LNAs 366 arecollectively depicted by a box 370. As described herein, some of all ofsuch circuits can be implemented on and/or in one or more SOI die. Asalso described herein, some or all of the filters 364 can be mounted onsuch one or more SOI die.

FIG. 10 shows a diversity RX module 360 that can be a more specificexample of the diversity RX module 360 of FIG. 9. In the example of FIG.10, the diversity RX module 360 is depicted as being configured toprocess two groups of frequency bands, Band 1 and Band 2. For example,the Band 1 group can include high-band (HB) frequency bands, and theBand 2 group can include medium-band (MB) frequency bands. Filteringand/or duplexing functionalities associated with such bands are shown tobe provided by filters/duplexers 102 a-102 h, collectively indicated as364. Tables 1 and 2 list examples of HB and MB frequency bands that canbe implemented in the diversity RX module 360.

TABLE 1 Filter/duplexer in FIG. 10 Frequency band 102a B7 102b B40 102cB41 102d B30

TABLE 2 Filter/duplexer in FIG. 10 Frequency band 102e B1 102f B25 102gB3 102h B4It will be understood that the diversity RX module 360 can be configuredto process other frequency bands. It will also be understood that thediversity RX module 360 can also have more or less numbers of groups offrequency bands (e.g., more than two or less than two groups).

In the example of FIG. 10, routing of signals associated with thefilters/duplexers 102 a-102 d for the Band 1 group can be facilitated byswitches 380, 382 before and after the filters/duplexers 102 a-102 d,respectively, and a switch 384 after a first LNA 388. The switch 380 canbe configured to provide, for example, a single-pole-4-throw (SP4T)functionality, with the pole receiving an RF signal from the Band 1antenna. The four throws can allow routing of the RF signal to aselected one of the filters/duplexers 102 a-102 d. Similarly, the switch382 can be configured to provide, for example, a single-pole-4-throw(SP4T) functionality, with the pole being coupled to the first LNA 388through a corresponding match network 386. The four throws of the switch382 can operate with the switch 380 to receive the RF signal from theselected one of the filters/duplexers 102 a-102 d, so as to route thefiltered signal to the first LNA 388. The output of the first LNA 388can be routed to one or more output paths. In the example, three outputpaths are shown, and selection of one of such paths can be facilitatedby, for example, the switch 384 being configured as an SP3T switch.

Similarly, routing of signals associated with the filters/duplexers 102e-102 h for the Band 2 group can be facilitated by switches 381, 383before and after the filters/duplexers 102 e-102 h, respectively, and aswitch 385 after a first LNA 389. The switch 381 can be configured toprovide, for example, a single-pole-5-throw (SP5T) functionality, withthe pole receiving an RF signal from the Band 2 antenna. Four of thefive throws can allow routing of the RF signal to a selected one of thefilters/duplexers 102 e-102 h, and the fifth throw can be utilized toprovide a bypass route 390. The switch 383 can be configured to provide,for example, an SP4T functionality, with the pole being coupled to thesecond LNA 389 through a corresponding match network 387. The fourthrows of the switch 383 can operate with the switch 381 to receive theRF signal from the selected one of the filters/duplexers 102 e-102 h, soas to route the filtered signal to the second LNA 389. The output of thesecond LNA 389 can be routed to one or more output paths. In theexample, three output paths are shown, and selection of one of suchpaths can be facilitated by, for example, the switch 385 beingconfigured as an SP3T switch.

In the example of FIG. 10, each of the example switches 382 and 384associated with the Band 1 group is depicted as having a single pole anda plurality of throws. Similarly, each of the example switches 383 and385 associated with the Band 2 group is depicted as having a single poleand a plurality of throws. It will be understood that some or all ofsuch switches can include more than one pole. For example, the switches382 and 383, individually or in any combination, can include a pluralityof poles that are coupled to inputs of different LNAs. In anotherexample, the switches 384 and 385, individually or in any combination,can include a plurality of poles that allow LNA outputs to be routed toone or more module outputs.

The foregoing switching configuration can provide flexibility in Rxarchitecture. For example, instead of implementing one LNA for multiplebands, a plurality of LNAs can be implemented utilizing the foregoingswitching configuration. Use of such LNAs can reduce the frequencycoverage range of each LNA and thereby improve performance.

The diversity RX module 360 of FIG. 10 is an example of how one or morefeatures of the present disclosure can be implemented in variousmodules. It will be understood that one or more features of the presentdisclosure can also be implemented in other types of modules. Forexample, a power amplifier (PA) module can benefit from one or morefeatures as described herein. Such a PA module can have an architecturesimilar to the example of FIG. 10, but with the amplification directionreversed such that LNA functionality is replaced with PA functionality.In another example, any modules that utilize, for example, SOIswitch(es), passive component(s) and resonator(s) (e.g., SAWresonator(s)) can benefit from one or more features of the presentdisclosure. In such modules, a configuration in which any type of filteror resonator is stacked relative to (e.g., above) an SOI switch, LNA, PAor any circuit block can be implemented.

In the example of FIG. 10, circuits associated with the switches 380,381, 382, 383, 384, 385, the LNAs 388, 389, and the match networks 386,387 are collectively depicted by a box 370, similar to the box 370 ofFIG. 9. As described herein, some of all of such circuits can beimplemented on and/or in one or more SOI die. For example, some of allof such circuits can be implemented on a single SOI die 104, as in theexample of FIG. 11. In another example, some of all of the circuitsbefore the filters/duplexers 364 can be implemented on a first SOI die104 a, and some of all of the circuits after the filters/duplexers 364can be implemented on a second SOI die 104 b as in the example of FIG.12.

As also described herein, some or all of the filters/duplexers 364 canbe mounted on such one or more SOI die. For example, if substantiallyall of the circuits associated with the box 370 are implemented onand/or in a single SOI die, then all eight of the filters/duplexers 102a-102 h can be mounted on such a single SOI die. In another example, ifthe circuits associated with the box 370 are implemented on and/or infirst and second SOI die, then the eight filters/duplexers 102 a-102 hcan be mounted on the first SOI die, on the second SOI die, or on bothdie.

FIG. 11 shows an example of the diversity RX module 360 of FIG. 10, inwhich circuits associated with the box 370 (in FIG. 10) can beimplemented in and/or on a single silicon die such as a single SOI die104. In FIG. 11, such circuits are also collectively depicted by a box370. The functionality of the filters/duplexers 102 a-102 h in theexample of FIG. 10 is depicted by the box 364. In the example of FIG.11, the same functionality (depicted as a box 364) can be implemented ina plurality of filters/duplexers 102 mounted on the single SOI die 104.

FIG. 12 shows an example of the diversity RX module 360 of FIG. 10, inwhich circuits associated with the box 370 (in FIG. 10) can beimplemented in and/or on a plurality of silicon die such as a pluralityof SOI die 104 a, 104 b. In FIG. 12, such circuits are also collectivelydepicted by boxes 370 a, 370 b. The functionality of thefilters/duplexers 102 a-102 h in the example of FIG. 10 is depicted bythe box 364. In the example of FIG. 12, the same functionality (depictedas boxes 364 a, 364 b) can be implemented in a plurality offilters/duplexers 102 mounted on the corresponding SOI die 104.

FIGS. 13 and 14 show yet another example where one or more features ofthe present disclosure can be implemented. FIG. 13 shows a diagram of anexample clock recovery circuit 500 configured to generate a timingsignal (at node 520) from an input of data signal (at node 510). Toachieve such functionality, an integrated circuit (IC) 504 including anedge detector 512, a mixer 514, and a voltage controlled oscillator(VCO) 518 can be configured as shown, along with a filter circuit 502including a low-pass filter (LPF) 516.

FIG. 14 shows that some or all of the clock recovery circuit 500 of FIG.13 can be implemented in a configuration having one or more filters 102mounted on one side of a semiconductor die 104 (e.g., BiCMOS die) andthe other side configured to be mountable (e.g., flip-chip mount withbump solders). As described herein, such a configuration of FIG. 14 canprovide a number of advantageous features, including significantreduction in the overall area of the circuit 500.

In the example clock recovery circuit 500 of FIG. 14, some or all of theIC 504 can be implemented on the semiconductor die 104. Some or all ofthe filter circuit 502 can be implemented in one or more of the filters102 mounted on the semiconductor die 104.

In the various examples described herein, a passive component caninclude a resistance element such as a resistor, a capacitance elementsuch as a capacitor, an inductance element such as an inductor, or anycombination thereof.

It will be understood that implementations of one or more features ofthe present disclosure in other types of RF circuits are also possible.

In some implementations, various examples described herein in referenceto FIGS. 7-14 can be viewed as a compact assembly of a circuit and asignal conditioning component, for which complete integration on oneprocess technology platform is not practical and/or not desirable. Asdescribed herein, such a compact assembly can provide benefitsassociated with having the signal conditioning component(s) (e.g.,filters) in close proximity to the circuit(s) (e.g., an active circuit).Such benefits can include, for example, minimizing signal loss betweenthe circuit and the signal conditioning component(s).

In some implementations, a device and/or a circuit having one or morefeatures described herein can be included in an RF device such as awireless device. Such a device and/or a circuit can be implementeddirectly in the wireless device, in a modular form as described herein,or in some combination thereof. In some embodiments, such a wirelessdevice can include, for example, a base station configured to providewireless services, a cellular phone, a smart-phone, a hand-held wirelessdevice with or without phone functionality, a wireless tablet, etc.

FIG. 15 depicts an example wireless device 400 having one or moreadvantageous features described herein. In the context of variousconfigurations as described herein, a front-end module havingfunctionality depicted as 300 can be a part of the wireless device. Insome embodiments, such a front-end module may or may not include a poweramplifier (PA) circuit 418, an LNA 322, and/or a bias/logic circuit 326.In the context of the example configuration 300 of FIGS. 7 and 8,components such as switching circuits associated with a band-selectionswitch 320, as well as filters associated with a duplexer circuit 420can be implemented in the front-end module. In some embodiments, thewireless device 400 can include a diversity RX module having one or morefeatures as described herein.

In the example wireless device 400, the PA circuit 418 having aplurality of PAs can provide an amplified RF signal to the switch 320(via the duplexer 420), and the switch 320 can route the amplified RFsignal to an antenna 424. The PA circuit 418 can receive an unamplifiedRF signal from a transceiver 414 that can be configured and operated inknown manners.

The transceiver 414 can also be configured to process received signals.Such received signals can be routed to the LNA 322 from the antenna 424,through the duplexer 420. Various operations of the LNA 322 can befacilitated by the bias/logic circuit 326.

The transceiver 414 is shown to interact with a baseband sub-system 410that is configured to provide conversion between data and/or voicesignals suitable for a user and RF signals suitable for the transceiver414. The transceiver 414 is also shown to be connected to a powermanagement component 406 that is configured to manage power for theoperation of the wireless device 400. Such a power management componentcan also control operations of the baseband sub-system 410 and thefront-end module.

The baseband sub-system 410 is shown to be connected to a user interface402 to facilitate various input and output of voice and/or data providedto and received from the user. The baseband sub-system 410 can also beconnected to a memory 404 that is configured to store data and/orinstructions to facilitate the operation of the wireless device, and/orto provide storage of information for the user.

A number of other wireless device configurations can utilize one or morefeatures described herein. For example, a wireless device does not needto be a multi-band device. In another example, a wireless device caninclude additional antennas such as diversity antenna, and additionalconnectivity features such as Wi-Fi, Bluetooth, and GPS.

One or more features of the present disclosure can be implemented withvarious cellular frequency bands as described herein. Examples of suchbands are listed in Table 3. It will be understood that at least some ofthe bands can be divided into sub-bands. It will also be understood thatone or more features of the present disclosure can be implemented withfrequency ranges that do not have designations such as the examples ofTable 3.

TABLE 3 Tx Frequency Rx Frequency Band Mode Range (MHz) Range (MHz) B1FDD 1,920-1,980 2,110-2,170 B2 FDD 1,850-1,910 1,930-1,990 B3 FDD1,710-1,785 1,805-1,880 B4 FDD 1,710-1,755 2,110-2,155 B5 FDD 824-849869-894 B6 FDD 830-840 875-885 B7 FDD 2,500-2,570 2,620-2,690 B8 FDD880-915 925-960 B9 FDD 1,749.9-1,784.9 1,844.9-1,879.9 B10 FDD1,710-1,770 2,110-2,170 B11 FDD 1,427.9-1,447.9 1,475.9-1,495.9 B12 FDD699-716 729-746 B13 FDD 777-787 746-756 B14 FDD 788-798 758-768 B15 FDD1,900-1,920 2,600-2,620 B16 FDD 2,010-2,025 2,585-2,600 B17 FDD 704-716734-746 B18 FDD 815-830 860-875 B19 FDD 830-845 875-890 B20 FDD 832-862791-821 B21 FDD 1,447.9-1,462.9 1,495.9-1,510.9 B22 FDD 3,410-3,4903,510-3,590 B23 FDD 2,000-2,020 2,180-2,200 B24 FDD 1,626.5-1,660.51,525-1,559 B25 FDD 1,850-1,915 1,930-1,995 B26 FDD 814-849 859-894 B27FDD 807-824 852-869 B28 FDD 703-748 758-803 B29 FDD N/A 716-728 B30 FDD2,305-2,315 2,350-2,360 B31 FDD 452.5-457.5 462.5-467.5 B33 TDD1,900-1,920 1,900-1,920 B34 TDD 2,010-2,025 2,010-2,025 B35 TDD1,850-1,910 1,850-1,910 B36 TDD 1,930-1,990 1,930-1,990 B37 TDD1,910-1,930 1,910-1,930 B38 TDD 2,570-2,620 2,570-2,620 B39 TDD1,880-1,920 1,880-1,920 B40 TDD 2,300-2,400 2,300-2,400 B41 TDD2,496-2,690 2,496-2,690 B42 TDD 3,400-3,600 3,400-3,600 B43 TDD3,600-3,800 3,600-3,800 B44 TDD 703-803 703-803

Unless the context clearly requires otherwise, throughout thedescription and the claims, the words “comprise,” “comprising,” and thelike are to be construed in an inclusive sense, as opposed to anexclusive or exhaustive sense; that is to say, in the sense of“including, but not limited to.” The word “coupled”, as generally usedherein, refers to two or more elements that may be either directlyconnected, or connected by way of one or more intermediate elements.Additionally, the words “herein,” “above,” “below,” and words of similarimport, when used in this application, shall refer to this applicationas a whole and not to any particular portions of this application. Wherethe context permits, words in the above Description using the singularor plural number may also include the plural or singular numberrespectively. The word “or” in reference to a list of two or more items,that word covers all of the following interpretations of the word: anyof the items in the list, all of the items in the list, and anycombination of the items in the list.

The above detailed description of embodiments of the invention is notintended to be exhaustive or to limit the invention to the precise formdisclosed above. While specific embodiments of, and examples for, theinvention are described above for illustrative purposes, variousequivalent modifications are possible within the scope of the invention,as those skilled in the relevant art will recognize. For example, whileprocesses or blocks are presented in a given order, alternativeembodiments may perform routines having steps, or employ systems havingblocks, in a different order, and some processes or blocks may bedeleted, moved, added, subdivided, combined, and/or modified. Each ofthese processes or blocks may be implemented in a variety of differentways. Also, while processes or blocks are at times shown as beingperformed in series, these processes or blocks may instead be performedin parallel, or may be performed at different times.

The teachings of the invention provided herein can be applied to othersystems, not necessarily the system described above. The elements andacts of the various embodiments described above can be combined toprovide further embodiments.

While some embodiments of the inventions have been described, theseembodiments have been presented by way of example only, and are notintended to limit the scope of the disclosure. Indeed, the novel methodsand systems described herein may be embodied in a variety of otherforms; furthermore, various omissions, substitutions and changes in theform of the methods and systems described herein may be made withoutdeparting from the spirit of the disclosure. The accompanying claims andtheir equivalents are intended to cover such forms or modifications aswould fall within the scope and spirit of the disclosure.

What is claimed is:
 1. A method of manufacturing a radio-frequencydevice, comprising: providing a semiconductor die including aradio-frequency circuit, a first side and a second side, and a pluralityof vias, each via configured to provide an electrical connection betweenthe first side and the second side of the semiconductor die; andmounting a filter device on the first side of the semiconductor die, thefilter device in communication with the radio-frequency circuit, theradio-frequency circuit implemented in a layer on the first side of thesemiconductor die and at least some of the vias coupled with theradio-frequency circuit to support an electrical connection between theradio-frequency circuit and mounting features on the second side of thesemiconductor die.
 2. The method of claim 1 wherein the second side ofthe semiconductor die is configured to be mountable in a flip-chipmanner.
 3. The method of claim 2 wherein the second side of thesemiconductor die includes a plurality of bump solders, at least some ofthe bump solders electrically connected to respective ones of theplurality of vias.
 4. The method of claim 2 wherein the semiconductordie includes a silicon-on-insulator substrate, the silicon-on-insulatorsubstrate including an insulator layer interposed between an activesilicon layer and a silicon substrate layer.
 5. The method of claim 1wherein the radio-frequency circuit further includes a switch circuit.6. The method of claim 5 wherein the radio-frequency circuit furtherincludes a logic circuit for the switch circuit.
 7. The method of claim6 wherein the radio-frequency circuit further includes one or more of alow-noise amplifier circuit and a power amplifier circuit.
 8. The methodof claim 6 wherein the radio-frequency circuit includes a band-selectioncircuit configured to route a received radio-frequency signal to aselected low-noise amplifier.
 9. The method of claim 8 wherein thereceived radio-frequency signal is routed through the filter deviceprior to the selected low-noise amplifier.
 10. The method of claim 8wherein the received radio-frequency signal is routed through the filterdevice after the selected low-noise amplifier.
 11. The method of claim 8wherein the radio-frequency circuit is part of a diversity receivemodule.
 12. The method of claim 1 wherein the filter device is anacoustic filter.
 13. A method of manufacturing a radio-frequency module,comprising: providing a packaging substrate configured to receive aplurality of components; and mounting a wafer level chip scale packageon the packaging substrate, the wafer level chip scale package having asilicon die that includes a radio-frequency circuit, a first side and asecond side, and a plurality of vias, each via configured to provide anelectrical connection between the first side and the second side of thesilicon die, the wafer level chip scale package further including afilter device mounted on the first side of the silicon die, the filterdevice in communication with the radio-frequency circuit, theradio-frequency circuit implemented in an active layer on the first sideof the silicon die and at least some of the vias coupled with theradio-frequency circuit to facilitate an electrical connection betweenthe radio-frequency circuit and mounting features on the second side ofthe silicon die, the radio-frequency circuit of the silicon dieincluding a switch circuit.
 14. The method of claim 13 wherein the waferlevel chip scale package has a lateral dimension that is less than 20%of a lateral area of a package with a silicon die with a similarradio-frequency circuit and a similar number of filter devices mountedon a packaging substrate instead of the silicon die.
 15. The method ofclaim 14 wherein the wafer level chip scale package has a height that isless than the height of the package.
 16. The method of claim 13 whereinthe filter device is an acoustic filter.
 17. The method of claim 13wherein the radio-frequency module is a diversity receive module.
 18. Amethod of manufacturing a wireless device, comprising: providing anantenna configured to receive a radio-frequency signal; providing areceiver in communication with the antenna, the receiver configured toprocess the received radio-frequency signal; and providing aradio-frequency module configured to route the received radio-frequencysignal from the antenna to the receiver, the radio-frequency moduleincluding a wafer level chip scale package, the wafer level chip scalepackage having a semiconductor die that includes a radio-frequencycircuit, a first side and a second side, and a plurality of vias, eachvia configured to provide an electrical connection between the firstside and the second side of the semiconductor die, the wafer level chipscale package further including a filter device mounted on the firstside of the semiconductor die, the filter device in communication withthe radio-frequency circuit, the radio-frequency circuit implemented ina layer on the first side of the semiconductor die and at least some ofthe vias coupled with the radio-frequency circuit to support anelectrical connection between the radio-frequency circuit and mountingfeatures on the second side of the semiconductor die.
 19. The method ofclaim 18 wherein the filter device is an acoustic filter.
 20. The methodof claim 18 wherein the radio-frequency module is a diversity receivemodule.